John Morris Scientific are pleased to offer MKS Instruments D.I.P. - high-density DeviceNet controller.

The D.I.P. comes with a mixture of analog and digital I/O for use on OEM process tools requiring industrial networked solutions for general purpose or gas box control use in the semiconductor industry.

The D.I.P. CDN572-5 provides 24 bi-directional digital I/O channels that can be freely mixed between inputs and outputs along with 8 analog output and 8 analog input channels. When used as an output (digital only), the input state can be read to verify signal integrity. DeviceNet™ MacID and baud rate may be set by rotary switches. On board monitoring of the digital supply voltages ensures that external power sources are within specifications.

The CDN572-5 is the second in a series of D.I.P. products which offers a mixture of analog and digital interfaces for OEM process tool manufacturers. In addition to providing a standard off-the-shelf solution, the CDN57X family may be easily customized through the development of specialized daughter boards.

The DeviceNet standard allows the interchangeability of simple devices while making interconnectivity of more complex devices possible. The DeviceNet specification and protocol are open.

The D.I.P. CDN572-5 is a DeviceNet I/O block housed in an extruded aluminum case. Signaling is optically isolated from all input and output. The CDN572-5 supports the ODVA/SemiSig Device Supervisor Object within a DeviceNet network. User selectable options within the Configuration Object allow the CDN572-5 to be tailored to the application by limiting the data transfers to exactly match the I/O requirements. On board isolated DC-DC converters provide 5V DC processor power from the DeviceNet supply voltage.

John Morris Scientific are pleased to introduce a Dual Range Manometer from MKS Instruments.

The Dual Range Manometer offers absolute pressure sensor compatibility with the reactive gases used in Semiconductor manufacturing.

Dual outputs provide accurate, reliable and repeatable pressure measurement and are used for multi-step processes such as CVD, etch and resist strip. MKS manometers cover the pressure range from 1 to 1000 Torr and the temperature can be controlled to 100^oC. It provides a customer specified second output which is 2, 5 or 10 x lower than the basic full scale range. Accuracy is 0.25% or reading 0.12% for 45^oC controlled units, providing greater resolution over the lower range of the instrument. The sensors have an integrated sump for particle protection.

The Dual Range Manometer comes in four versions, D24B, with a lowest full scale of 10 Torr and controlled to 45oC; D27B, 1 Torr and 45^oC; and D28B, 1 Torr and 100^oC. Relay status is indicated by dual colour LEDs, and relay set points can be used for valve operation, safety interlocks, or pump crossover control.

John Morris Scientific a pleased to introduce MKS Instruments Web enabled residual gas analyser, the E-Vision RGA.

The E-Vision RGA has an integrated Ethernet interface and embedded web server enabling operation over any TCT/IP network, including the internet.

The E-Vision RGA is a vacuum system with applications including aerospace, outgassing studies, heat treatment, vacuum deposition of optical thin films, DVD/CD and data storage manufacturing, university and industry research, and high energy physics and particle accelerators.

The E-Vision RGA reduces the need for computers as the system operator can control the e-vision RGA, monitor the vacuum environment, see relevant data and make operating decisions from any physical location and from any computer with web access. The E-vision RGA provides control for vacuum troubleshooting, system status checks, leak detection and baseline chamber gas monitoring in a wide range of vacuum applications at pressures up 10^-4 Torr.

The E-Vision RGA system downloads a highly intuitive JAVA applet onto the user’s computer containing all of the routines required for vacuum troubleshooting, including a leak detection mode. Users can also directly interface with the E-Vision RGA through MKS’s new EasyView software or ASC II. EasyView is an RGA control platform that capitalizes on the features and functionality of the latest Microsoft operating system, and includes all of the routines required for general RGA applications as well as a number of advanced features.

MKS Instruments is pleased to introduce the new MultiGas 2030. The MultiGas 2030 is a high speed FTIR based analyser for automotive, diesel and catalyst emissions.

The MultiGas 2030 is ideal for use in a variety of applications such as stack emissions monitoring, process monitoring, ambient air monitoring, purity monitoring and selective catalytic reduction performance monitoring. The MultiGas 2030 can perform analysis in gas streams that contain up to 30% water and can simultaneously analyse and display more than 30 gases.

The MultiGas 2030 collects high resolution infrared spectra which are analysed against the instruments independent quantitative spectral library. This provides an accurate, highly sensitive measurement of most gases and vapours.

Operators will find the robust, fully automated MultiGas 2030 easy to operate and maintain. With the ability of the MultiGas 2030 to permanently store calibration spectra, the need for costly gas cylinders is reduced.

The MFC offers process reliability and device flexibility of all your gas delivery applications.

The MFC includes improvements in functionality and performance to help users in semiconductor and high purity thin film applications increase tool throughput and reduce overall system costs.

Real-time accurate flow control that is insensitive to upstream and downstream pressure disturbances is provided through advanced digital algorithms. By enabling real-time control of process gas flow, accuracy and repeatability is significantly improved over conventional PID based digital MFC’s resulting in better chamber matching.

The MFC is cost effective for users through several innovative enhancements. To reduce the amount of MFC’s in inventory, users are able to access specific MFC gas calibrations and flow ranges from up to 31 stored gas tables, configuring the MFC straight off the shelf.

The MFC is easy to use, the gas selection and full-scale range can be easily selected by the user via the included web browser.

The PICO Sniffer is a portable and battery operated mass spectrometer-based helium leak detector.

The PICO can be used in a variety of industries where pressurised components need to be tested for leaks. In semiconductor manufacturing the leak detector is used during piping installation and cylinder changes where leak-tight integrity is critical for health and safety.

Traditionally leak detection has been accomplished with either a large instrument which proves difficult to transport, or with an instrument that was lightweight but unable to meet reliability and sensitivity requirements. The PICO Sniffer has a minimum detectable leak rate of 1 x 10^-7 atm-cc/s, is 4 inches wide, 15 inches long, 10 inches high and weighs only 7kg.

The Pure Solve System eliminates thermal distillation risks associated with heating mantles or hotplates and flammable solvents, the risk of explosion from incorrect sodium storage and handling and the risk of flood with unsupervised, water cooled distillation apparatus.

The Innovative Technology solutions operate by passing room temperature solvent through proprietary activated columns using cylinder Nitrogen as a pressure source. The system effectively removes water and oxygen to produce dry, deoxygenated High-Purity Solvents on tap.

Innovative Technologies offer three systems in the Pure-Solve range:

1. The New Pure Solv-Micro - ideal for researchers with modest  requirements for a single anhydrous solvent who prefer the convenience of having a solvent drying and dispensing station of their own. The Micro is designed for mounting on a bench top, flammable storage cabinet, or inside an existing fume hood.

2. The Pure Solv-MD (Multiple Dispensing System) - ideal for laboratories with multiple researchers who require easy access to more than one anhydrous solvent. There are three standard frame sizes which can be populated from 2 – 7 solvents.

3. The Pure Solv-EN system is fully enclosed inside a 90 minute fire safety cabinet which meets the performance requirements for storing flammable liquids. The EN provides the following capabilities:

• Minimizes fire risks associated with the storage of flammable substances
• Protection of the cabinet's contents in the event of fire for a known (tested) minimum length of time
• Minimizes the amount of vapour released into the working environment and the retention of accidental spillage within the cabinet