John Morris Scientific are pleased to introduce the MKS MultiGas 2030 HS-5 Hz. The MultiGas 2030 HS-5 Hz is a high resolution FTIR based analyser designed to monitor automobile, diesel and catalyst manufactures to measure transient components in the advanced chemistries and methodologies used to meet new emissions regulations.

The MultiGas 2030 HS-5 Hz is capable of simultaneously monitoring 20+ traditional and non-traditional combustion gases with up to 5 measurements per second. The FTIR system provides high resolution (0.5 cm^-1) data even at 5 Hz and detection limits below 1 ppm at 5 Hz.

The MultiGas 2030 HS-5 Hz can speciate NOx, hydrocarbons, as well as quantify NH3 and N2O. Combustion exhaust gases flow through heated gas lines to the 200ml gas cell (calibrated at both 150°C and 191°C) eliminating condensation, while flow rates up to and above 100L per minute prevent diffusion and measurement delay.

The MultiGas 2030 HS-5 Hz feature software analyses and reports concentrations for many compounds simultaneously. The Software performs automatic corrections for gas temperature and pressure variations, which are measured directly by the analyser. Samples are acquired and analysed in less than 0.2 seconds making transient analysis possible.

The 2030 MultiGas Analyser is also available as online version for flue gas monitoring and as 2030 MultiGas Purity for real-time trace impurity detection.

John Morris Scientific are pleased to offer MKS Instruments range of RF Plasma generators (Nova, Spectrum, SurePower, Genesis and ACG). RF plasma generators are ideal for High Density Plasma CVD (HDPCVD), Plasma Enhanced Chemical Vapour Deposition (PECVD), etching and other thin film applications during the manufacturing of integrated circuits, photovoltaic devices, flat panel displays, and data storage devices.

Nova RF plasma generators provide power from 2.5kW–5.0kW at a frequency of 2 MHz. The Nova series offers advanced RF plasma generation and control for low cost and high yield in the most demanding thin film processing applications.

Spectrum RF plasma generators provide power from 1.5kW-11kW across a range of frequencies (2 MHz, 3.2 MHz and 13.56 MHz) to meet the increasing demands of thin film processing. The Spectrum series features high density, excellent stability, generous power margins and high reliability for lower cost of ownership and improved yield.

SurePower RF plasma generators are the most advanced 13.56 MHz generators commercially available. The SurePower series is available with power levels from 3.5kW-13.0kW. Featuring patented intrinsic power amplifier protection, improved design margins and embedded V/I probe sensors the SurePower is extremely reliable.

Genesis RF plasma generators provide a wide range of power (1.25–13.0kW) across a range of frequencies (13.56 MHz, 27.12 MHz and 40.68 MHz). The Genesis offers field-proven reliability, exceptional stability for high uptime and process yield.

ACG - Air-Cooled RF Generators provides power from 300-600 Watts at a frequency of 13.56 MHz. With frequency stability and power accuracy the AGC is an effective solution for most low power applications.

The Matchwork line of impedance matching networks improves process repeatability and yield by providing high speed tuning to match the chambers variable impedance to the generators working load.

The V/I Probe RF impedance analyser uses DSP technology to obtain real-time, highly accurate, user-programmable data on load voltage, current and phase angle. This results in optimised process performance and yield by process endpoint detection, monitoring, deposition thickness and other RF metrology diagnostics.

When the RF generator, the Matchwork and the V/I Probe are used together they form a complete RF delivery system for Closed-loop monitoring and control, providing improved process consistency and higher yield.

John Morris Scientific are pleased to offer MKS instruments atmospheric pressure gas monitor, the Cirrus.

The Cirrus offers quadrupole mass spectrometry in a convenient bench-top configuration.

Cirrus systems are ideal for on-line monitoring and analysis of gases and gas mixtures including trace contaminants in process gases, solvent vapours, hydrocarbons, atmospheric and inorganic gas species (including corrosives), freons and noble gases.

At the centre of every Cirrus system is a precision-built quadrupole analyser incorporating a closed ion source, a triple mass filter and a dual (Faraday and Secondary Electron Multiplier) detector system. Using a quadrupole analyser enables the monitoring of multiple gases at the same time over a wide dynamic range (from ppb to percentage levels).The automated gas monitoring system can be operated via a single Ethernet interface.

MKS Process Eye software provides application-specific interpretation, control, and alarm functions, and allows correlation with data from other sensors. A silica capillary inlet provides rapid response, while an insert chamber and low-maintenance, automated bake-out and heating capability ensures low background contamination and prevents condensation during measurement.

The Cirrus features web-enabled technology and allows direct access via Ethernet interface for operation via your local network or even the internet.

John Morris Scientific are pleased to offer MKS Instruments D.I.P. - high-density DeviceNet controller.

The D.I.P. comes with a mixture of analog and digital I/O for use on OEM process tools requiring industrial networked solutions for general purpose or gas box control use in the semiconductor industry.

The D.I.P. CDN572-5 provides 24 bi-directional digital I/O channels that can be freely mixed between inputs and outputs along with 8 analog output and 8 analog input channels. When used as an output (digital only), the input state can be read to verify signal integrity. DeviceNet™ MacID and baud rate may be set by rotary switches. On board monitoring of the digital supply voltages ensures that external power sources are within specifications.

The CDN572-5 is the second in a series of D.I.P. products which offers a mixture of analog and digital interfaces for OEM process tool manufacturers. In addition to providing a standard off-the-shelf solution, the CDN57X family may be easily customized through the development of specialized daughter boards.

The DeviceNet standard allows the interchangeability of simple devices while making interconnectivity of more complex devices possible. The DeviceNet specification and protocol are open.

The D.I.P. CDN572-5 is a DeviceNet I/O block housed in an extruded aluminum case. Signaling is optically isolated from all input and output. The CDN572-5 supports the ODVA/SemiSig Device Supervisor Object within a DeviceNet network. User selectable options within the Configuration Object allow the CDN572-5 to be tailored to the application by limiting the data transfers to exactly match the I/O requirements. On board isolated DC-DC converters provide 5V DC processor power from the DeviceNet supply voltage.

John Morris Scientific are pleased to introduce a Dual Range Manometer from MKS Instruments.

The Dual Range Manometer offers absolute pressure sensor compatibility with the reactive gases used in Semiconductor manufacturing.

Dual outputs provide accurate, reliable and repeatable pressure measurement and are used for multi-step processes such as CVD, etch and resist strip. MKS manometers cover the pressure range from 1 to 1000 Torr and the temperature can be controlled to 100^oC. It provides a customer specified second output which is 2, 5 or 10 x lower than the basic full scale range. Accuracy is 0.25% or reading 0.12% for 45^oC controlled units, providing greater resolution over the lower range of the instrument. The sensors have an integrated sump for particle protection.

The Dual Range Manometer comes in four versions, D24B, with a lowest full scale of 10 Torr and controlled to 45oC; D27B, 1 Torr and 45^oC; and D28B, 1 Torr and 100^oC. Relay status is indicated by dual colour LEDs, and relay set points can be used for valve operation, safety interlocks, or pump crossover control.

John Morris Scientific a pleased to introduce MKS Instruments Web enabled residual gas analyser, the E-Vision RGA.

The E-Vision RGA has an integrated Ethernet interface and embedded web server enabling operation over any TCT/IP network, including the internet.

The E-Vision RGA is a vacuum system with applications including aerospace, outgassing studies, heat treatment, vacuum deposition of optical thin films, DVD/CD and data storage manufacturing, university and industry research, and high energy physics and particle accelerators.

The E-Vision RGA reduces the need for computers as the system operator can control the e-vision RGA, monitor the vacuum environment, see relevant data and make operating decisions from any physical location and from any computer with web access. The E-vision RGA provides control for vacuum troubleshooting, system status checks, leak detection and baseline chamber gas monitoring in a wide range of vacuum applications at pressures up 10^-4 Torr.

The E-Vision RGA system downloads a highly intuitive JAVA applet onto the user’s computer containing all of the routines required for vacuum troubleshooting, including a leak detection mode. Users can also directly interface with the E-Vision RGA through MKS’s new EasyView software or ASC II. EasyView is an RGA control platform that capitalizes on the features and functionality of the latest Microsoft operating system, and includes all of the routines required for general RGA applications as well as a number of advanced features.

MKS Instruments is pleased to introduce the new MultiGas 2030. The MultiGas 2030 is a high speed FTIR based analyser for automotive, diesel and catalyst emissions.

The MultiGas 2030 is ideal for use in a variety of applications such as stack emissions monitoring, process monitoring, ambient air monitoring, purity monitoring and selective catalytic reduction performance monitoring. The MultiGas 2030 can perform analysis in gas streams that contain up to 30% water and can simultaneously analyse and display more than 30 gases.

The MultiGas 2030 collects high resolution infrared spectra which are analysed against the instruments independent quantitative spectral library. This provides an accurate, highly sensitive measurement of most gases and vapours.

Operators will find the robust, fully automated MultiGas 2030 easy to operate and maintain. With the ability of the MultiGas 2030 to permanently store calibration spectra, the need for costly gas cylinders is reduced.

The MFC offers process reliability and device flexibility of all your gas delivery applications.

The MFC includes improvements in functionality and performance to help users in semiconductor and high purity thin film applications increase tool throughput and reduce overall system costs.

Real-time accurate flow control that is insensitive to upstream and downstream pressure disturbances is provided through advanced digital algorithms. By enabling real-time control of process gas flow, accuracy and repeatability is significantly improved over conventional PID based digital MFC’s resulting in better chamber matching.

The MFC is cost effective for users through several innovative enhancements. To reduce the amount of MFC’s in inventory, users are able to access specific MFC gas calibrations and flow ranges from up to 31 stored gas tables, configuring the MFC straight off the shelf.

The MFC is easy to use, the gas selection and full-scale range can be easily selected by the user via the included web browser.

The PICO Sniffer is a portable and battery operated mass spectrometer-based helium leak detector.

The PICO can be used in a variety of industries where pressurised components need to be tested for leaks. In semiconductor manufacturing the leak detector is used during piping installation and cylinder changes where leak-tight integrity is critical for health and safety.

Traditionally leak detection has been accomplished with either a large instrument which proves difficult to transport, or with an instrument that was lightweight but unable to meet reliability and sensitivity requirements. The PICO Sniffer has a minimum detectable leak rate of 1 x 10^-7 atm-cc/s, is 4 inches wide, 15 inches long, 10 inches high and weighs only 7kg.